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Technical
Low Temperature Alternatives for Reactive Sputtering of High Quality Stoichiometric Metal Nitride Films
Silicon nitride (Si3N4) films, RF bias assisted reactive sputtering, Remote plasma-assisted reactive sputtering, Bipolar HiPIMS, Superconducting titanium nitride (TiN) films
Functional Bio-enabled Nanomaterials: from Adaptive Photonic Materials to Actuating Flexible Magnets
Nanomaterials, bio-enabled materials, nanomagnets